Zeolite-inspired low-k dielectrics overcoming limitations of zeolite films
Publication Type: Journal Articles (Refereed Article)
Year of Publication: 2008
Author(s): Eslava, Salvador, Urrutia, Jone, Busawon, Abheesh N., Baklanov, Mikhail R., Iacopi, Francesca, Aldea, Steliana, Maex, Karen, Martens, Johan A., Kirschhock, Christine E.A.