Extension of the Deal-Grove Oxidation Model to Include the Effects of Nitrogen

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Title Extension of the Deal-Grove Oxidation Model to Include the Effects of Nitrogen
Author Dimitrijev, Sima; Harrison, Barry; Sweatman, Denis Russell
Year Published 1996
Publisher Institute of Electrical and Electronics Engineers
Citation IEEE Transactions on Electron Devices, Vol. 43(2), pp. 267-272
Peer Reviewed Yes
Published Yes
Publisher URI http://ieeexplore.ieee.org/Xplore/dynhome.jsp
Alternative URI http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arnumber=481727
Copyright Statement Copyright 1996 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
Research Centre Queensland Micro and Nanotechnology Centre
Faculty Faculty of Engineering and Information Technology
Publication Type Article in Scholarly Refereed Journal

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