Extension of the Deal-Grove Oxidation Model to Include the Effects of Nitrogen
| File | Size | Format | |
|---|---|---|---|
| 4673.pdf | 704Kb | Adobe PDF | View |
| Title | Extension of the Deal-Grove Oxidation Model to Include the Effects of Nitrogen |
|---|---|
| Author | Dimitrijev, Sima; Harrison, Barry; Sweatman, Denis Russell |
| Year Published | 1996 |
| Publisher | Institute of Electrical and Electronics Engineers |
| Citation | IEEE Transactions on Electron Devices, Vol. 43(2), pp. 267-272 |
| Peer Reviewed | Yes |
| Published | Yes |
| Publisher URI | http://ieeexplore.ieee.org/Xplore/dynhome.jsp |
| Alternative URI | http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arnumber=481727 |
| Copyright Statement | Copyright 1996 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. |
| Research Centre | Queensland Micro and Nanotechnology Centre |
| Faculty | Faculty of Engineering and Information Technology |
| Publication Type | Article in Scholarly Refereed Journal |
Please use this identifier to cite this record: http://hdl.handle.net/10072/15745
Griffith University copyright notice
Copyright in individual works within the repository belongs to their authors or publishers. You may make a print or digital copy of a work for your personal non-commercial use. All other rights are reserved, except for fair dealings or other user rights granted by the copyright laws of your country.
Footer information
Back to top