Analysis of surface generation mechanisms in MOS capacitors
| File | Size | Format | |
|---|---|---|---|
| 44458_1.pdf | 203Kb | Adobe PDF | View |
| Title | Analysis of surface generation mechanisms in MOS capacitors |
|---|---|
| Author | Kong, Frederick Chung Jeng; Tanner, Philip; Hold, Leonie Katharina; Han, Jisheng; Dimitrijev, Sima |
| Publication Title | Analysis of surface generation mechanisms in MOS capacitors |
| Conference name | 25th International Conference on Microelectronics (MIEL 2006) |
| Year Published | 2006 |
| Publisher | IEEE |
| Peer Reviewed | Yes |
| Published | Yes |
| Alternative URI | http://dx.doi.org/10.1109/ICMEL.2006.1651017 |
| Publisher URI | http://ieeexplore.ieee.org/xpl/tocresult.jsp?isnumber=34620&isYear=2006 |
| Copyright Statement | Copyright 2006 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. |
| Research Centre | Queensland Micro and Nanotechnology Centre |
| Faculty | Faculty of Science, Environment, Engineering and Technology |
| Publication Type | Conference Publications (Full Written Paper - Refereed) |
Please use this identifier to cite this record: http://hdl.handle.net/10072/22854
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