Analysis of surface generation mechanisms in MOS capacitors

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Title Analysis of surface generation mechanisms in MOS capacitors
Author Kong, Frederick Chung Jeng; Tanner, Philip; Hold, Leonie Katharina; Han, Jisheng; Dimitrijev, Sima
Publication Title Analysis of surface generation mechanisms in MOS capacitors
Conference name 25th International Conference on Microelectronics (MIEL 2006)
Year Published 2006
Publisher IEEE
Peer Reviewed Yes
Published Yes
Alternative URI http://dx.doi.org/10.1109/ICMEL.2006.1651017
Publisher URI http://ieeexplore.ieee.org/xpl/tocresult.jsp?isnumber=34620&isYear=2006
Copyright Statement Copyright 2006 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
Research Centre Queensland Micro and Nanotechnology Centre
Faculty Faculty of Science, Environment, Engineering and Technology
Publication Type Conference Publications (Full Written Paper - Refereed)

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