A proposed nanofabrication technique using optical masks for metastable atom lithography

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Title A proposed nanofabrication technique using optical masks for metastable atom lithography
Author Baker, Mark Adam; Palmer, Adam James; Sang, Robert
Publication Title Proceedings of the 2004 Conference on Optoelectronic and Microelectronic Materials and Devices
Conference name 2004 Conference on Optoelectronic and Microelectronic Materials and Devices
Year Published 2005
Publisher IEEE
Peer Reviewed Yes
Published Yes
Alternative URI http://dx.doi.org/10.1109/COMMAD.2004.1577560
Copyright Statement Copyright 2005 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
Research Centre Centre for Quantum Dynamics
Faculty Faculty of Science, Environment, Engineering and Technology
Publication Type Conference Publications (Full Written Paper - Refereed)

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