SIMS investigation of Oxygen in 3C-SiC on Si

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Title SIMS investigation of Oxygen in 3C-SiC on Si
Author Han, Jisheng; Dimitrijev, Sima; Kong, Frederick Chung Jeng; Tanner, Philip; Atanacio, Armand
Publication Title Proceedings of the 2008 conference on optoelectronics and microelctronic materials and devices
Editor Lorenzo Faraone
Year Published 2008
Publisher IEEE
Peer Reviewed Yes
Published Yes
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Copyright Statement Copyright 2008 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
Research Centre Queensland Micro and Nanotechnology Centre
Faculty Faculty of Science, Environment, Engineering and Technology
Publication Type Conference Publications (Full Written Paper - Refereed)

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