MEMS Wind Direction Detection: From Design to Operation

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Title MEMS Wind Direction Detection: From Design to Operation
Author Adamec, Richard; Thiel, David Victor; Tanner, Philip
Publication Title Proceedings of IEEE Sensors, 2003: Volume 1
Year Published 2003
Publisher IEEE
Abstract A multi-axis hotwire anemometer fabricated with bulk micro-machining and thin film semiconductor technologies is presented. Extending the operation of a single axis anemometer into 2 axes allows direction sensing over the full 0° - 360° while maintaining the original ability to measure flow velocity via the forced convection heat loss. Eliminating separate heating and sensing elements and combining both functions into single element pairs provides a means of lowering the temperature and power requirements and reducing size and fabrication complexity of the sensor compared to previously seen designs. CAD and modeling have aided in preparation of a suitable design to be fabricated in house using primarily photolithography and wet chemical etching. Successful wind tunnel trials have paved the way for field-testing and a commercially realizable sensor.
Peer Reviewed Yes
Published Yes
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Copyright Statement Copyright 2003 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
ISBN 0-7803-8133-5
Conference name Second IEEE International Conference on Sensors Conference 2
Location Toronto, Canada
Date From 2003-10-22
Date To 2004-10-24
Date Accessioned 2009-11-12
Language en_AU
Research Centre Queensland Micro and Nanotechnology Centre
Faculty Faculty of Science, Environment, Engineering and Technology
Subject PRE2009-Geotechnical Engineering
Publication Type Conference Publications (Full Written Paper - Refereed)
Publication Type Code e1a

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