P-type doping of epitaxial 3C-SiC layers on Silicon (001)

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Title P-type doping of epitaxial 3C-SiC layers on Silicon (001)
Author Wagner, G.; Schmidbauer, M.; Irmscher, K.; Tanner, Philip; Fornari, R.
Editor Amador Pérez-Tomás,Fred H Wohlbier, Graeme Murch, Yiu-Wing Mai
Year Published 2009
Publisher Trans Tech Publications Ltd
Citation Materials Science Forum, Vol. 615-617, pp. 165-168
Peer Reviewed Yes
Published Yes
Publisher URI http://www.scientific.net/MSF
Alternative URI http://dx.doi.org/10.4028/www.scientific.net/MSF.615-617.165
Copyright Statement Copyright 2009 Trans Tech Publications. Self-archiving of the author-manuscript version is not yet supported by this publisher. Please refer to the journal link for access to the definitive, published version or contact the authors for more information.
Research Centre Queensland Micro and Nanotechnology Centre
Faculty Faculty of Science, Environment, Engineering and Technology
Publication Type Journal Articles (Refereed Article)

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