Transition between amorphous and crystalline phases of SiC deposited on Si substrate using H3SiCH3

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Title Transition between amorphous and crystalline phases of SiC deposited on Si substrate using H3SiCH3
Author Wang, Li; Dimitrijev, Sima; Han, Jisheng; Iacopi, Francesca; Zou, Jin
Year Published 2009
Publisher Elsevier BV
Citation Journal of Crystal Growth, Vol. 311(19), pp. 4442-4446
Peer Reviewed Yes
Published Yes
Alternative URI http://dx.doi.org/10.1016/j.jcrysgro.2009.07.036
Copyright Statement Copyright 2009 Elsevier B.V.. This is the author-manuscript version of this paper. Reproduced in accordance with the copyright policy of the publisher. Please refer to the journal's website for access to the definitive, published version.
Research Centre Queensland Micro and Nanotechnology Centre
Faculty Faculty of Science, Environment, Engineering and Technology
Publication Type Journal Articles (Refereed Article)

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