Transition between amorphous and crystalline phases of SiC deposited on Si substrate using H3SiCH3

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Title Transition between amorphous and crystalline phases of SiC deposited on Si substrate using H3SiCH3
Author Wang, Li; Dimitrijev, Sima; Han, Jisheng; Iacopi, Francesca; Zou, Jin
Journal Name Journal of Crystal Growth
Year Published 2009
Place of publication Netherlands
Publisher Elsevier BV
Abstract This paper presents a study of the transition between amorphous and crystalline phases of SiC films deposited on Si(1 0 0) substrate using H3SiCH3 as a single precursor by a conventional low-pressure chemical vapor deposition method in a hot-wall reactor. The microstructure of SiC, characterized by X-ray diffraction and high-resolution transmission electron microscopy, is found to vary with substrate temperature and H3SiCH3 pressure. The grain size decreases with increasing MS pressure at a given temperature and also decreases with reducing temperature at a given MS pressure. The deposition rates are exponentially dependent on the substrate temperature with the activation energy of around 2.6 eV. The hydrogen compositional concentration in the deposited SiC films, determined by secondary ion mass spectrometry depth profiling, is only 2.9% in the nanocrystalline SiC but more than 10% in the amorphous SiC, decreasing greatly with increasing deposition temperature. No hydride bonds are detected by Fourier transform infrared spectroscopy measurements. The chemical order of the deposited SiC films improves with increasing deposition temperature.
Peer Reviewed Yes
Published Yes
Alternative URI http://dx.doi.org/10.1016/j.jcrysgro.2009.07.036
Copyright Statement Copyright 2009 Elsevier B.V.. This is the author-manuscript version of this paper. Reproduced in accordance with the copyright policy of the publisher. Please refer to the journal's website for access to the definitive, published version.
Volume 311
Issue Number 19
Page from 4442
Page to 4446
ISSN 0022-0248
Date Accessioned 2009-10-15
Language en_AU
Research Centre Queensland Micro and Nanotechnology Centre
Faculty Faculty of Science, Environment, Engineering and Technology
Subject Surfaces and Structural Properties of Condensed Matter
URI http://hdl.handle.net/10072/30350
Publication Type Journal Articles (Refereed Article)
Publication Type Code c1

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