Derivation of a nonlinear variance equation and its application to SOI Technology
| File | Size | Format | |
|---|---|---|---|
| 14024.pdf | 137Kb | Adobe PDF | View |
| Title | Derivation of a nonlinear variance equation and its application to SOI Technology |
|---|---|
| Author | Rowlands, David Duanne; Dimitrijev, Sima |
| Year Published | 2000 |
| Publisher | Institute of Electrical and Electronics Engineers |
| Citation | IEEE Transactions on Semiconductor Manufacturing, Vol. 13, pp. 492-496 |
| Peer Reviewed | Yes |
| Published | Yes |
| Alternative URI | http://dx.doi.org/10.1109/66.892635 |
| Copyright Statement | Copyright 2000 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. |
| Research Centre | Queensland Micro and Nanotechnology Centre; Centre for Wireless Monitoring and Applications |
| Publication Type | Article in Scholarly Refereed Journal |
Please use this identifier to cite this record: http://hdl.handle.net/10072/3041
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