Derivation of a nonlinear variance equation and its application to SOI Technology
| File | Size | Format | |
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| 14024.pdf | 137Kb | Adobe PDF | View |
| Title | Derivation of a nonlinear variance equation and its application to SOI Technology |
|---|---|
| Author | Rowlands, David Duanne; Dimitrijev, Sima |
| Journal Name | IEEE Transactions on Semiconductor Manufacturing |
| Year Published | 2000 |
| Place of publication | USA |
| Publisher | Institute of Electrical and Electronics Engineers |
| Abstract | An analytic nonlinear equation for variance was derived along with a method based on response surface mapping techniques to calculate the variance using the proposed equation. The technique was applied to the threshold voltage of a 0.1-μm silicon-on-insulator MOS device, and the variance value obtained was verified using Monte Carlo simulation. The threshold voltage dependence upon active-layer thickness was found to be highly nonlinear due to the device's going from the fully depleted to the partially depleted regime. Analysis of the variance showed that the effect of the nonlinear terms (18.7%) is more important than the effect of the mixed term (-0.7%) and almost as important as the contribution of the second most dominant input-process parameter (23.6%). This illustrates the importance of the proposed nonlinear equation |
| Peer Reviewed | Yes |
| Published | Yes |
| Alternative URI | http://dx.doi.org/10.1109/66.892635 |
| Copyright Statement | Copyright 2000 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. |
| Volume | 13 |
| Page from | 492 |
| Page to | 496 |
| ISSN | 0894-6507 |
| Date Accessioned | 2001-01-01 |
| Date Available | 2010-10-12T06:55:44Z |
| Language | en_AU |
| Research Centre | Queensland Micro and Nanotechnology Centre; Centre for Wireless Monitoring and Applications |
| Subject | PRE2009-Science & Technology |
| URI | http://hdl.handle.net/10072/3041 |
| Publication Type | Article in Scholarly Refereed Journal |
| Publication Type Code | c1 |
Please use this identifier to cite this record: http://hdl.handle.net/10072/3041
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