SIMS Investigation of Oxygen in 3C-SiC on Si

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Title SIMS Investigation of Oxygen in 3C-SiC on Si
Author Han, Jisheng; Dimitrijev, Sima; Kong, Frederick Chung Jeng; Atanacio, Amanda
Year Published 2009
Publisher David Publishing Company
Citation Journal of Materials Science and Engineering, Vol. 3(8), pp. 15-17
Peer Reviewed Yes
Published Yes
Publisher URI
Copyright Statement Copyright 2009 David Publishing. The attached file is reproduced here in accordance with the copyright policy of the publisher. Please refer to the journal's website for access to the definitive, published version.
Research Centre Queensland Micro and Nanotechnology Centre
Faculty Faculty of Science, Environment, Engineering and Technology
Publication Type Journal Articles (Refereed Article)

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