Nitridation of Silicon with Ammonia and Nitrogen

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Title Nitridation of Silicon with Ammonia and Nitrogen
Author Chaustowski, Rene; Wang, Yong; Zou, Jin; Han, Jisheng; Dimitrijev, Sima
Year Published 2010
Publisher World Scientific Publishing Co. Pte. Ltd.
Citation International Journal of Nanoscience, Vol. 9(3), pp. 169-174
Peer Reviewed Yes
Published Yes
Alternative URI http://dx.doi.org/10.1142/S0219581X10006582
Research Centre Queensland Micro and Nanotechnology Centre
Faculty Faculty of Science, Environment, Engineering and Technology
Publication Type Journal Articles (Refereed Article)

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