Growth of 3C-SiC on 150-mm Si(100) substrates by alternating supply epitaxy at 1000 °C

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Title Growth of 3C-SiC on 150-mm Si(100) substrates by alternating supply epitaxy at 1000 °C
Author Wang, Li; Dimitrijev, Sima; Han, Jisheng; Iacopi, Alan Victor; Hold, Leonie Katharina; Tanner, Philip; Harrison, Barry
Year Published 2011
Publisher Elsevier
Citation Thin Solid Films, Vol. 519(19), pp. 6443-6446
Peer Reviewed Yes
Published Yes
Alternative URI http://dx.doi.org/10.1016/j.tsf.2011.04.224
Copyright Statement Copyright 2011 Elsevier. This is the author-manuscript version of this paper. Reproduced in accordance with the copyright policy of the publisher. Please refer to the journal's website for access to the definitive, published version.
Research Centre Queensland Micro and Nanotechnology Centre
Faculty Faculty of Science, Environment, Engineering and Technology
Publication Type Journal Articles (Refereed Article)

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