A 2-DOF MEMS Ultrasonic Energy Harvester

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Title A 2-DOF MEMS Ultrasonic Energy Harvester
Author Zhu, Yong; Moheimani, S. O. Reza; Yuce, Mehmet Rasit
Journal Name IEEE Sensors Journal
Year Published 2011
Place of publication United States
Publisher IEEE
Abstract This paper reports a novel ultrasonic-based wireless power transmission technique that has the potential to drive implantable biosensors. Compared with commonly used radio-frequency (RF) radiation methods, the ultrasonic power transmission is relatively safe for the human body and does not cause electronic interference with other electronic circuits. To extract ambient kinetic energy with arbitrary in-plane motion directions, a novel 2-D MEMS power harvester has been designed with resonance frequencies of 38 520 and 38 725 Hz. Frequency-response characterization results verify that the device can extract energy from the directions of X, Y, and diagonals. Working in the diagonal direction, the device has a bandwidth of 302 Hz, which is twice wider than a comparable 1-D resonator device. A 1- uF storage capacitor is charged up from 0.51 to 0.95 V in 15 s, when the harvester is driven by an ultrasonic transducer at a distance of 0.5 cm in the X-direction, and is biased by 60 Vdc, indicating the energy harvesting capability of 21.4 nW in the X-direction. When excited along the Y-axis, the harvester has an energy-harvesting capacity of 22.7 nW. The harvester was modeled and simulated using an equivalent electrical circuit model in Saber, and the simulation results showed good agreement with the experimental results. The ultrasonic energy harvesting was also investigated using a 1-D piezoelectric micro-cantilever.
Peer Reviewed Yes
Published Yes
Alternative URI http://dx.doi.org/10.1109/JSEN.2010.2053922
Volume 11
Issue Number 1
Page from 155
Page to 161
ISSN 1530-437X
Date Accessioned 2011-11-17; 2012-02-15T04:50:19Z
Date Available 2012-02-15T04:50:19Z
Research Centre Queensland Micro and Nanotechnology Centre
Faculty Faculty of Science, Environment, Engineering and Technology
Subject Microelectromechanical Systems (MEMS); Microelectronics and Integrated Circuits
URI http://hdl.handle.net/10072/42706
Publication Type Journal Articles (Refereed Article)
Publication Type Code c1

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