Evidence of large voids in pure-silica-zeolite low-k dielectrics synthesized by spin-on of nanoparticle suspensions

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Title Evidence of large voids in pure-silica-zeolite low-k dielectrics synthesized by spin-on of nanoparticle suspensions
Author Eslava, Salvador; Baklanov, Mikhail R.; Neimark, Alexander V.; Iacopi, Francesca; Kirschhock, Christine E.A.; Maex, Karen; Martens, Johan A.
Year Published 2008
Publisher Wiley - V C H Verlag GmbH & Co. KGaA
Citation Advanced Materials, Vol. 20(16), pp. 3110-3116
Peer Reviewed Yes
Published Yes
Alternative URI http://dx.doi.org/10.1002/adma.200701798
Research Centre Queensland Micro and Nanotechnology Centre
Faculty Faculty of Science, Environment, Engineering and Technology
Publication Type Journal Articles (Refereed Article)

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