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Evidence of large voids in pure-silica-zeolite low-k dielectrics synthesized by spin-on of nanoparticle suspensions

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Title Evidence of large voids in pure-silica-zeolite low-k dielectrics synthesized by spin-on of nanoparticle suspensions
Author Eslava, Salvador; Baklanov, Mikhail R.; Neimark, Alexander V.; Iacopi, Francesca; Kirschhock, Christine E.A.; Maex, Karen; Martens, Johan A.
Journal Name Advanced Materials
Year Published 2008
Place of publication Germany
Publisher Wiley - V C H Verlag GmbH & Co. KGaA
Abstract Spin-on pure-silica-zeolite or Silicalite films are currently considered as outstanding low-k materials because of their stiffness and ultralow dielectric constant. It is shown that spin-on Silicalite films with low k values unavoidably contain cavities tens of nanometers wide, representing a considerable challenge in their application as on-chip interconnects.
Peer Reviewed Yes
Published Yes
Alternative URI http://dx.doi.org/10.1002/adma.200701798
Volume 20
Issue Number 16
Page from 3110
Page to 3116
ISSN 1521-4095
Date Accessioned 2012-02-18; 2012-03-20T23:02:38Z
Date Available 2012-03-20T23:02:38Z
Research Centre Queensland Micro and Nanotechnology Centre
Faculty Faculty of Science, Environment, Engineering and Technology
Subject Synthesis of Materials
URI http://hdl.handle.net/10072/43710
Publication Type Journal Articles (Refereed Article)
Publication Type Code c1x

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