Characterization of spin-on zeolite films prepared from Silicalite-1nanoparticle suspensions

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Title Characterization of spin-on zeolite films prepared from Silicalite-1nanoparticle suspensions
Author Eslava, Salvador; Kirschhock, Christine E.A.; Aldea, Steliana; Baklanov, Mikhail R.; Iacopi, Francesca; Maex, Karen; Martens, Johan A.
Journal Name Microporous and Mesoporous Materials
Year Published 2009
Place of publication Netherlands
Publisher Elsevier BV
Abstract Spin-on porous films were prepared on silicon wafers using Silicalite-1 nanozeolite suspensions crystallized from clear solution. The content and size of Silicalite-1 nanocrystals and of residual ∼2–4 nm nanoparticles in the starting suspensions were varied by varying the crystallization time. The films were characterized using scanning electron microscopy, X-ray diffraction, spectroscopic ellipsometry, atomic force microscopy, Fourier transform infrared spectroscopy, ellipsometric porosimetry, impedance analysis and nanoindentation. All the properties of spin-on Silicalite-1 films strongly depended on the composition of the Silicalite-1 suspensions spun onto the support. With increasing Silicalite-1 nanocrystal content, crystallinity, hydrophobicity and porosity increased, while elastic modulus, homogeneity, roughness, and dielectric constant decreased. Their implementation in on-chip interconnects is discussed.
Peer Reviewed Yes
Published Yes
Alternative URI http://dx.doi.org/10.1016/j.micromeso.2008.09.027
Volume 118
Issue Number 1-3
Page from 458
Page to 466
ISSN 1387-1811
Date Accessioned 2012-02-18; 2012-03-21T23:11:33Z
Research Centre Queensland Micro and Nanotechnology Centre
Faculty Faculty of Science, Environment, Engineering and Technology
Subject Synthesis of Materials
URI http://hdl.handle.net/10072/43765
Publication Type Journal Articles (Refereed Article)
Publication Type Code c1x

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