Characterization of spin-on zeolite films prepared from Silicalite-1nanoparticle suspensions

Abstract

Spin-on porous films were prepared on silicon wafers using Silicalite-1 nanozeolite suspensions crystallized from clear solution. The content and size of Silicalite-1 nanocrystals and of residual ∼2–4 nm nanoparticles in the starting suspensions were varied by varying the crystallization time. The films were characterized using scanning electron microscopy, X-ray diffraction, spectroscopic ellipsometry, atomic force microscopy, Fourier transform infrared spectroscopy, ellipsometric porosimetry, impedance analysis and nanoindentation. All the properties of spin-on Silicalite-1 films strongly depended on the composition of the Silicalite-1 suspensions spun onto the support. With increasing Silicalite-1 nanocrystal content, crystallinity, hydrophobicity and porosity increased, while elastic modulus, homogeneity, roughness, and dielectric constant decreased. Their implementation in on-chip interconnects is discussed.