Zeolite-inspired low-k dielectrics overcoming limitations of zeolite films

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Title Zeolite-inspired low-k dielectrics overcoming limitations of zeolite films
Author Eslava, Salvador; Urrutia, Jone; Busawon, Abheesh N.; Baklanov, Mikhail R.; Iacopi, Francesca; Aldea, Steliana; Maex, Karen; Martens, Johan A.; Kirschhock, Christine E.A.
Year Published 2008
Publisher American Chemical Society
Citation Journal of the American Chemical Society, Vol. 130(51), pp. 17528-17536
Peer Reviewed Yes
Published Yes
Alternative URI http://dx.doi.org/10.1021/ja8066572
Copyright Statement Self-archiving of the author-manuscript version is not yet supported by this journal. Please refer to the journal link for access to the definitive, published version or contact the author[s] for more information.
Research Centre Queensland Micro and Nanotechnology Centre
Faculty Faculty of Science, Environment, Engineering and Technology
Publication Type Journal Articles (Refereed Article)

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