Zeolite-inspired low-k dielectrics overcoming limitations of zeolite films

There are no files associated with this record.

Title Zeolite-inspired low-k dielectrics overcoming limitations of zeolite films
Author Eslava, Salvador; Urrutia, Jone; Busawon, Abheesh N.; Baklanov, Mikhail R.; Iacopi, Francesca; Aldea, Steliana; Maex, Karen; Martens, Johan A.; Kirschhock, Christine E.A.
Journal Name Journal of the American Chemical Society
Year Published 2008
Place of publication United States
Publisher American Chemical Society
Abstract Spin-on zeolite films deposited from Silicalite-1 nanocrystal suspensions prepared by hydrothermal treatment of clear solutions have the required properties for insulating media in microelectronics. However, on the scale of the feature sizes in on-chip interconnects of a few tens of nanometers, their homogeneity is still insufficient. We discovered a way to overcome this problem by combining the advantages of the clear solution approach of Silicalite-1 synthesis with a sol-gel approach. A combination of tetraethyl orthosilicate and methyltrimethoxysilane silica sources was hydrolyzed and cocondensed in the presence of an aqueous tetraalkylammonium hydroxide template. The resulting suspension of nanoparticles of a few nanometers in size together with residual oligomeric silica species were spun onto support. The final zeolite-inspired low-k films (ZLK) with respect to pore size and homogeneity satisfied all requirements and presented excellent hydrophobicity, stiffness, and dielectric constant. The size and content of initially formed nanoparticles and the spatial hindrance promoted by occluded tetraalkylammonium molecules were found to be crucial elements in the definition of the final pore network.
Peer Reviewed Yes
Published Yes
Alternative URI http://dx.doi.org/10.1021/ja8066572
Copyright Statement Self-archiving of the author-manuscript version is not yet supported by this journal. Please refer to the journal link for access to the definitive, published version or contact the author[s] for more information.
Volume 130
Issue Number 51
Page from 17528
Page to 17536
ISSN 0002-7863
Date Accessioned 2012-02-18; 2012-03-29T05:06:42Z
Research Centre Queensland Micro and Nanotechnology Centre
Faculty Faculty of Science, Environment, Engineering and Technology
Subject Synthesis of Materials
URI http://hdl.handle.net/10072/44086
Publication Type Journal Articles (Refereed Article)
Publication Type Code c1x

Show simple item record

Griffith University copyright notice