Novel fabrication process for a monolithic PMMA torsion mirror and vertical comb actuator

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Title Novel fabrication process for a monolithic PMMA torsion mirror and vertical comb actuator
Author Amaya, Satoshi; Dao, Dzung Viet; Sugiyama, Susumu
Year Published 2011
Publisher Institute of Physics Publishing Ltd.
Citation Journal of Micromechanics and Microengineering, Vol. 21(6), pp. 065032-1-065032-7
Peer Reviewed Yes
Published Yes
Alternative URI http://dx.doi.org/10.1088/0960-1317/21/6/065032
Research Centre Queensland Micro and Nanotechnology Centre
Faculty Faculty of Science, Environment, Engineering and Technology
Publication Type Journal Articles (Refereed Article)

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