Novel fabrication process for a monolithic PMMA torsion mirror and vertical comb actuator

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Title Novel fabrication process for a monolithic PMMA torsion mirror and vertical comb actuator
Author Amaya, Satoshi; Dao, Dzung Viet; Sugiyama, Susumu
Journal Name Journal of Micromechanics and Microengineering
Year Published 2011
Place of publication United Kingdom
Publisher Institute of Physics Publishing Ltd.
Abstract This paper presents a novel fabrication process for monolithic PMMA (polymethylmethacrylate) vertical comb-drive actuators utilizing hot embossing, surface-activated direct bonding and elliptical vibration cutting. The robustness and capability of the method are demonstrated through the fabrication of sophisticated PMMA freestanding microstructures, such as a rotation mirror device integrated with vertical comb actuators. The fabrication process consists of silicon mold fabrication by deep-RIE, PMMA microstructure formation by hot embossing, PMMA–PMMA direct bonding by surface activation, releasing or removal of a PMMA layer remaining after hot embossing by elliptical vibration cutting, and finally, metallization by sputtering to form electrodes. An efficient technique to protect the PMMA microstructures during the release process using reinforcement material is applied. A monolithic PMMA torsion mirror driven by a vertical comb actuator has been fabricated successfully.
Peer Reviewed Yes
Published Yes
Alternative URI
Volume 21
Issue Number 6
Page from 065032-1
Page to 065032-7
ISSN 0960-1317
Date Accessioned 2012-02-29; 2012-04-10T22:47:34Z
Research Centre Queensland Micro and Nanotechnology Centre
Faculty Faculty of Science, Environment, Engineering and Technology
Subject Interdisciplinary Engineering
Publication Type Journal Articles (Refereed Article)
Publication Type Code c1x

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