Characterisation of the growth of a carbonaceous film on silicon

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Title Characterisation of the growth of a carbonaceous film on silicon
Author Beardmore, Josh; Palmer, Adam James; Fabrie, Corine Geertruide Christina Hemienne; Leeuwen, K.A.H. van; Sang, Robert
Journal Name Thin Solid Films
Editor J. E. Greene
Year Published 2012
Place of publication Switzerland
Publisher Elsevier
Abstract In this paperwe present the first characterisation of growth of a carbonaceous film on a silicon substrate exposed to a metastable atom beam using an in situ rotating polariser ellipsometer. The initial deposition of oil due to a background partial pressure in vacuum is investigated. Subsequent exposure of the deposited oil to a high flux metastable neon (Ne*) beam results in cross-linking of the oil film, creating a polymerised carbonaceous layer. Values for the mean residence time, polymerisation cross-section, and desorption cross-section are calculated and compared to similar studies performed for ion bombardment. Simple estimates can provide reasonable values for application of the theory to other systems.
Peer Reviewed Yes
Published Yes
Alternative URI http://dx.doi.org/10.1016/j.tsf.2011.09.073
Volume 520
Issue Number 7
Page from 2414
Page to 2417
ISSN 0040-6090
Date Accessioned 2012-01-31; 2012-07-13T05:21:34Z
Date Available 2012-07-13T05:21:34Z
Research Centre Centre for Quantum Dynamics
Faculty Faculty of Science, Environment, Engineering and Technology
Subject Atomic and Molecular Physics
URI http://hdl.handle.net/10072/45872
Publication Type Journal Articles (Refereed Article)
Publication Type Code c1

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