Low frequency noise measurement and analysis of capacitive micro-accelerometers
Author(s)
Mohd-Yasin, F
Nagel, DJ
Ong, DS
Korman, CE
Chuah, HT
Griffith University Author(s)
Year published
2007
Metadata
Show full item recordAbstract
Noise measurements of micro-accelerometers were performed using a special measurement system. A common spectral behavior of noise is found, with 1/f noise dominating at low frequencies and white thermal noise being the limiting factor at higher frequencies. Unexpected resonances are also observed in the commercial devices. Most importantly, an acceleration dependent of the noise is found in analog devices and freescale accelerometers, in contrast to prevailing theory.Noise measurements of micro-accelerometers were performed using a special measurement system. A common spectral behavior of noise is found, with 1/f noise dominating at low frequencies and white thermal noise being the limiting factor at higher frequencies. Unexpected resonances are also observed in the commercial devices. Most importantly, an acceleration dependent of the noise is found in analog devices and freescale accelerometers, in contrast to prevailing theory.
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Journal Title
Microelectronic Engineering
Volume
84
Issue
5-8
Subject
Condensed matter physics
Other physical sciences