Single mask, simple structure micro rotational motor driven by electrostatic comb-drive actuators

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Title Single mask, simple structure micro rotational motor driven by electrostatic comb-drive actuators
Author Pham, Phuc Hong; Dao, Dzung Viet; Dang, Lam Bao; Sugiyama, Susumu
Year Published 2012
Publisher Institute of Physics Publishing Ltd.
Citation Journal of Micromechanics and Microengineering, Vol. 22(1), pp. 015008-1-015008-7
Peer Reviewed Yes
Published Yes
Alternative URI http://dx.doi.org/10.1088/0960-1317/22/1/015008
Research Centre Queensland Micro and Nanotechnology Centre
Faculty Faculty of Science, Environment, Engineering and Technology
Publication Type Journal Articles (Refereed Article)

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