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dc.contributor.authorPhuc, Hong Pham
dc.contributor.authorDzung, Viet Dao
dc.contributor.authorLam, Bao Dang
dc.contributor.authorSugiyama, Susumu
dc.date.accessioned2017-05-03T16:09:07Z
dc.date.available2017-05-03T16:09:07Z
dc.date.issued2012
dc.date.modified2012-09-20T22:43:25Z
dc.identifier.issn0960-1317
dc.identifier.doi10.1088/0960-1317/22/1/015008
dc.identifier.urihttp://hdl.handle.net/10072/46936
dc.description.abstractWe report a design and fabrication of a new micro rotational motor (MRM) using silicon micromachining technology with the overall diameter of 2.4 mm. This motor utilizes four silicon electrostatic comb-drive actuators to drive the outer ring (or rotor) through ratchet teeth. The novel design of the anti-reverse structure helps us to overcome the gap problem after deep reactive ion etching of silicon. The MRM was fabricated by using silicon on insulator wafer with the thickness of the device layer being 30 孠and one mask only. The motor was successfully tested for performance. It was driven by periodic voltage with different frequencies ranging from 1 to 50 Hz. The angular velocity of the outer ratchet ring was proportional to the frequency. Moreover, when the driving frequency is lower than 30 Hz, the experiment results perfectly match the theoretical calculation.
dc.description.peerreviewedYes
dc.description.publicationstatusYes
dc.languageEnglish
dc.language.isoeng
dc.publisherInstitute of Physics Publishing Ltd.
dc.publisher.placeUnited Kingdom
dc.relation.ispartofstudentpublicationN
dc.relation.ispartofpagefrom015008-1
dc.relation.ispartofpageto015008-7
dc.relation.ispartofissue1
dc.relation.ispartofjournalJournal of Micromechanics and Microengineering
dc.relation.ispartofvolume22
dc.rights.retentionN
dc.subject.fieldofresearchEngineering
dc.subject.fieldofresearchEngineering practice and education not elsewhere classified
dc.subject.fieldofresearchcode40
dc.subject.fieldofresearchcode401099
dc.titleSingle mask, simple structure micro rotational motor driven by electrostatic comb-drive actuators
dc.typeJournal article
dc.type.descriptionC1 - Articles
dc.type.codeC - Journal Articles
gro.date.issued2012
gro.hasfulltextNo Full Text
gro.griffith.authorDao, Dzung V.


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