Single mask, simple structure micro rotational motor driven by electrostatic comb-drive actuators

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Title Single mask, simple structure micro rotational motor driven by electrostatic comb-drive actuators
Author Pham, Phuc Hong; Dao, Dzung Viet; Dang, Lam Bao; Sugiyama, Susumu
Journal Name Journal of Micromechanics and Microengineering
Year Published 2012
Place of publication United Kingdom
Publisher Institute of Physics Publishing Ltd.
Abstract We report a design and fabrication of a new micro rotational motor (MRM) using silicon micromachining technology with the overall diameter of 2.4 mm. This motor utilizes four silicon electrostatic comb-drive actuators to drive the outer ring (or rotor) through ratchet teeth. The novel design of the anti-reverse structure helps us to overcome the gap problem after deep reactive ion etching of silicon. The MRM was fabricated by using silicon on insulator wafer with the thickness of the device layer being 30 µm and one mask only. The motor was successfully tested for performance. It was driven by periodic voltage with different frequencies ranging from 1 to 50 Hz. The angular velocity of the outer ratchet ring was proportional to the frequency. Moreover, when the driving frequency is lower than 30 Hz, the experiment results perfectly match the theoretical calculation.
Peer Reviewed Yes
Published Yes
Alternative URI http://dx.doi.org/10.1088/0960-1317/22/1/015008
Volume 22
Issue Number 1
Page from 015008-1
Page to 015008-7
ISSN 0960-1317
Date Accessioned 2012-03-05; 2012-09-20T22:43:25Z
Research Centre Queensland Micro and Nanotechnology Centre
Faculty Faculty of Science, Environment, Engineering and Technology
Subject Interdisciplinary Engineering
URI http://hdl.handle.net/10072/46936
Publication Type Journal Articles (Refereed Article)
Publication Type Code c1x

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