Design of Silicon Carbide (SiC) Capacitive Pressure Sensor Diaphragm
Author(s)
Marsi, Noraini
Majlis, Burhanuddin Yeop
Hamzah, Azrul Azlan
Mohd-Yasin, Faisal
Griffith University Author(s)
Year published
2012
Metadata
Show full item recordConference Title
Design of Silicon Carbide (SiC) Capacitive Pressure Sensor Diaphragm
Publisher URI
Subject
Microelectromechanical Systems (MEMS)
Microelectronics and Integrated Circuits