Lithographic pattern formation via metastable state rare gas atomic beams

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Title Lithographic pattern formation via metastable state rare gas atomic beams
Author Baker, Mark Adam; Palmer, Adam James; MacGillivray, William Robinson; Sang, Robert
Year Published 2004
Publisher Institute of Physics Publishing
Citation Nanotechnology, Vol. 15, pp. 1356-1362
Peer Reviewed Yes
Published Yes
Publisher URI http://www.iop.org/EJ/journal/Nano
Alternative URI http://dx.doi.org/10.1088/0957-4484/15/9/041
Research Centre Centre for Quantum Dynamics
Faculty Faculty of Science
Publication Type Journal Articles (Refereed Article)

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