Properties of Nitrided Oxides on SiC

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Title Properties of Nitrided Oxides on SiC
Author Dimitrijev, Sima; Harrison, Barry; Tanner, Philip; Cheong, Kuan Yew; Han, Jisheng
Book Title Silicon Carbide: Recent Major Advances
Editor W. J. Choyke, H. Matsunami, G. Pensl
Year Published 2003
Citation Berlin: Springer-Verlag pp. 373-386
Peer Reviewed Yes
Published Yes
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Copyright Statement Copyright 2003 Springer. The attached file is reproduced here in accordance with the copyright policy of the publisher.The original publication is available at
Research Centre Queensland Micro and Nanotechnology Centre
Faculty Faculty of Engineering and Information Technology
Publication Type Book Chapters

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