A bulk machined thermo-restive convective accelerometer
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| Title | A bulk machined thermo-restive convective accelerometer |
|---|---|
| Author | Adamec, Richard; Thiel, David Victor |
| Publication Title | SPIE International Symposium Microelectronics MEMs and nanotechnology |
| Editor | Alex J Hariz |
| Year Published | 2005 |
| Publisher | SPIE |
| Peer Reviewed | No |
| Published | Yes |
| Publication Type | Conference Publications (Full Written Paper - Non-Refereed) |
Please use this identifier to cite this record: http://hdl.handle.net/10072/8667
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