A bulk machined thermo-restive convective accelerometer

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Title A bulk machined thermo-restive convective accelerometer
Author Adamec, Richard; Thiel, David Victor
Publication Title SPIE International Symposium Microelectronics MEMs and nanotechnology
Editor Alex J Hariz
Year Published 2005
Publisher SPIE
Peer Reviewed No
Published Yes
Publication Type Conference Publications (Full Written Paper - Non-Refereed)

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