A bulk machined thermo-restive convective accelerometer

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Title A bulk machined thermo-restive convective accelerometer
Author Adamec, Richard; Thiel, David Victor
Publication Title SPIE International Symposium Microelectronics MEMs and nanotechnology
Editor Alex J Hariz
Year Published 2005
Place of publication USA
Publisher SPIE
Peer Reviewed No
Published Yes
Conference name Microelectronics: Design Technology and Packaging II
Location Brisbane
Date From 2005-12-11
Date To 2006-01-14
URI http://hdl.handle.net/10072/8667
Date Accessioned 2006-01-30
Language en_AU
Faculty Faculty of Engineering and Information Technology
Subject Other Electronic Engineering
Publication Type Conference Publications (Full Written Paper - Non-Refereed)
Publication Type Code e2

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