Modelling and fabrication of a planar thin film airflow sensor

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Title Modelling and fabrication of a planar thin film airflow sensor
Author Adamec, Richard; Tanner, Philip; Thiel, David Victor
Publication Title Proceedings of SPIE Vol 4593
Editor Franzon, Paul, D.
Year Published 2001
Publisher The International Society for Optical Engineering
Peer Reviewed No
Published Yes
Publication Type Conference Publications (Full Written Paper - Non-Refereed)

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