Modelling and fabrication of a planar thin film airflow sensor
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| Title | Modelling and fabrication of a planar thin film airflow sensor |
|---|---|
| Author | Adamec, Richard; Tanner, Philip; Thiel, David Victor |
| Publication Title | Proceedings of SPIE Vol 4593 |
| Editor | Franzon, Paul, D. |
| Year Published | 2001 |
| Publisher | The International Society for Optical Engineering |
| Peer Reviewed | No |
| Published | Yes |
| Publication Type | Conference Publications (Full Written Paper - Non-Refereed) |
Please use this identifier to cite this record: http://hdl.handle.net/10072/9234
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