Modelling and fabrication of a planar thin film airflow sensor

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Title Modelling and fabrication of a planar thin film airflow sensor
Author Adamec, Richard; Tanner, Philip; Thiel, David Victor
Publication Title Proceedings of SPIE Vol 4593
Editor Franzon, Paul, D.
Year Published 2001
Place of publication USA
Publisher The International Society for Optical Engineering
Peer Reviewed No
Published Yes
ISBN 0 8194 4323 9
Conference name Design, Characterization, and Packaging for MEMs and Microelectronics II
Location Adelaide, Sout Australia
Date From 2001-12-17
Date To 2001-12-19
URI http://hdl.handle.net/10072/9234
Date Accessioned 2002-04-15
Date Available 2007-03-11T22:07:32Z
Language en_AU
Research Centre Centre for Wireless Monitoring and Applications; Queensland Micro and Nanotechnology Centre
Subject Engineering/Technology Instrumentation
Publication Type Conference Publications (Full Written Paper - Non-Refereed)
Publication Type Code e2

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