Modelling and fabrication of a planar thin film airflow sensor
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| Title | Modelling and fabrication of a planar thin film airflow sensor |
|---|---|
| Author | Adamec, Richard; Tanner, Philip; Thiel, David Victor |
| Publication Title | Proceedings of SPIE Vol 4593 |
| Editor | Franzon, Paul, D. |
| Year Published | 2001 |
| Place of publication | USA |
| Publisher | The International Society for Optical Engineering |
| Peer Reviewed | No |
| Published | Yes |
| ISBN | 0 8194 4323 9 |
| Conference name | Design, Characterization, and Packaging for MEMs and Microelectronics II |
| Location | Adelaide, Sout Australia |
| Date From | 2001-12-17 |
| Date To | 2001-12-19 |
| URI | http://hdl.handle.net/10072/9234 |
| Date Accessioned | 2002-04-15 |
| Date Available | 2007-03-11T22:07:32Z |
| Language | en_AU |
| Research Centre | Centre for Wireless Monitoring and Applications; Queensland Micro and Nanotechnology Centre |
| Subject | Engineering/Technology Instrumentation |
| Publication Type | Conference Publications (Full Written Paper - Non-Refereed) |
| Publication Type Code | e2 |
Please use this identifier to cite this record: http://hdl.handle.net/10072/9234
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