Scaling effects on deep-submicron vertical MOSFETs

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Title Scaling effects on deep-submicron vertical MOSFETs
Author Ahmadi, Amin; Rowlands, David Duanne; Alam, K.
Publication Title Microelectronics, MEMS, and Nanotechnology SPIE volume 6035: MICROELECTRONICS: DESIGN, TECHNOLOGY, AND PACKAGING II
Year Published 2005
Publisher International Society for Optical Engineering (SPIE)
Peer Reviewed No
Published Yes
Publication Type Conference Publications (Extract Paper)

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