A method of self-calibration for integrated capacitive sensors

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Title A method of self-calibration for integrated capacitive sensors
Author Johnson, Peter M.; James, Daniel A.; Thiel, David V.; Cornelius, Mark
Publication Title Abstract Book SPIE Conference, Volume 5649, Issue PART 2, 2005
Editor C Y Kwok & V K Varadan
Year Published 2005
Place of publication Bellingham WA
Publisher SPIE
Abstract In a sensor employing changes in capacitance the introduction of two additional reference electrodes can assist in the minimization and correction of errors introduced in the manufacturing process and from changes in environmental conditions. The two extra electrodes that reflect the maximum and minimum values of the measuring electrode are constructed during the same lithographic process and in close proximity to the active electrode. In preliminary trials of 79 sensors the unconnected error in reading was nearly 20% of full scale and dropped to 4% of full scale after applying the correction. The technique with support electronics printed on flexible substrates allow the sensor to be small, integrated and "smart".
Peer Reviewed No
Published Yes
Alternative URI http://dx.doi.org/10.1117/12.581977
Conference name SPIE International Symposium on Smart Materials, Nano and Micro-smart systems
Location Sydney
Date From 2004-12-12
Date To 2004-12-15
URI http://hdl.handle.net/10072/9889
Date Accessioned 2005-03-31
Language en_AU
Faculty Faculty of Science, Environment, Engineering and Technology
Subject PRE2009-Engineering/Technology Instrumentation
Publication Type Conference Publications (Extract Paper)
Publication Type Code e3

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